Fundamentals
and applications of living anionic polymerization

Particular reference is made to the DSA (Directed Self-Assembly)

NANO POLYMER Inc.
Kazuhiro Hirahara

Table of Contents

  1. Introduction
  2. Example of previous work
  3. Relative evaluation method of block copolymers
  4. Hypothesis of Defect Occurrence
  5. Living anionic polymerization using breakable seal method
  6. The challenge of HVM(High-Volume Manufacturing)
  7. Examples of DSAs we have synthesized
  8. Synthesis and characterization of DSA
  9. Further challenges for HVM
  10. Other DSA
  11. Purification and trace analysis of DSA
  12. NIL+DSA and EUV+DSA
  13. Intel’s Position on EUV+DSA(cited material)
  14. Award and Honors
  15. Comparison with other companies’ products (reference data)
  16. Appendix ALD studies
  17. ALD (Atomic Layer Deposition)
  18. Last but now least
  19. References